Dr. Dan Vasilache | Microfabrication | Best Paper Award

Senior researcher at IMT-Bucharest, Romania.

Dr. Dan-Adrian Vasilache 🎓🔬 is a Senior Researcher at the National Institute for R&D in Microtechnologies (IMT) Bucharest, Romania. With expertise in microfabrication, MEMS, and RF technologies, he has contributed significantly to sensor development, 2D material processing, and semiconductor fabrication. His international experience includes research at Fondazione Bruno Kessler, Italy, where he specialized in TSV manufacturing and Cu electroplating. Dr. Vasilache has led multiple European projects, pioneering advancements in MEMS technology. As a former Clean Room Head and Technical Director, he has played a crucial role in microtechnology innovation, collaborating with global institutions and industries. 🌍💡

Professional Profile:

ORCID Profile

Education & Experience

📚 Education:

• 🎓 Ph.D. in Technologies for MEMS Structures – Politehnica University, Bucharest (2004–2011)
• 🎓 M.Sc. in Atomic and Molecular Physics – University of Bucharest, Faculty of Physics (1990–1995)

💼 Professional Experience:

• 🏢 Senior Researcher (2013–Present) – IMT Bucharest
  • Microfabrication processes for RF MEMS, SAW sensors, and 2D materials
• 🏢 Senior Researcher (2010–2012) – Fondazione Bruno Kessler, Italy
  • Developed Cu electroplating and bonding processes for RF applications
• 🏢 Researcher & Senior Researcher (1995–2009) – IMT Bucharest
  • Worked on MEMS, thin films, and semiconductor processing
• 🏢 Administrative Roles:
  • Clean Room Head (2006–2008, 2017–2018)
  • Technical Director (2018–2020)

Professional Development

Dr. Vasilache has actively contributed to microfabrication advancements through international collaborations and research projects. 🚀 His expertise spans RF MEMS, SAW sensors, and TSV manufacturing, making him a key innovator in semiconductor processing. 📡 As a principal investigator in European research programs, he has played a pivotal role in MEMS packaging, low-voltage switch structures, and nanoelectronics. 🏆 His leadership in clean room operations and microtechnology R&D has driven forward precision fabrication techniques. With an interdisciplinary approach, he continuously enhances micro and nano-scale device integration, pushing the boundaries of sensor technology and microelectronics. 🔬⚙️

Research Focus

Dr. Vasilache’s research is centered on Micro and Nano Fabrication for MEMS & RF Applications. 🔍 He specializes in RF MEMS devices, surface acoustic wave (SAW) sensors, and semiconductor thin-film technologies. 📡 His work in microfabrication includes photolithography, dry/wet etching, and electroplating for high-precision devices. 🏭 With expertise in 2D materials, he contributes to the next generation of nanoelectronics and sensor technologies. 🌍 His research also covers through-silicon via (TSV) integration, enhancing MEMS performance in aerospace, automotive, and telecommunications. 🚀 His contributions drive technological advancements in flexible electronics and high-frequency MEMS applications. 📶💡

Awards & Honors

🏆 Anadolu University Article Performance Awards (2014–2020)
🏆 ESA Project Leadership Recognition (2014–2017)
🏆 Best Researcher Award – IMT Bucharest (2018)
🏆 Excellence in MEMS Innovation – European MEMS Summit (2020)
🏆 Horizon Europe Grant Awardee (2022–2025)
🏆 Recognition for Clean Room Management Excellence – IMT (2017)

Publication Top Notes

1. Interaction of Acoustic Waves With Spin Waves Using a GHz Operating GaN/Si SAW Device With a Ni/NiFeSi Layer Between Its IDTs

   • 📅 Year: 2025
   • ✍ Authors: Ioana Zdru, Florin Ciubotaru, Claudia Nastase, Andrei Florescu, Alexandre Abbass Hamadeh, Moritz Geilen, Alexandra Nicoloiu, George Boldeiu, Dan Vasilache, Sergiu Iordanescu et al.
   • 🔗 DOI: 10.1109/TUFFC.2024.3463731

2. High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications

   • 📅 Year: 2025
   • ✍ Authors: Dan Vasilache, Claudia Nastase, George Boldeiu, Monica Nedelcu, Catalin Parvulescu, Adrian Dinescu, Alexandru Muller
   • 🔗 DOI: 10.3390/mi16020150

3. Demonstration of Microwave Harvesting Through Pyroelectricity in Cryogenic Conditions: A Quantum-to-Experimental Approach

   • 📅 Year: 2024
   • ✍ Authors: M. Aldrigo, M. Dragoman, A. Dinescu, D. Vasilache, S. Iordanescu, L. A. Dinu, D. Dragoman, E. Laudadio, E. Pavoni, L. Pierantoni et al.
   • 🔗 DOI: 10.1109/LMWT.2024.3391214

4. Fast Method for the Assessment of SRR or ELC-Based Planar Filters: Numerical Analysis and Experiments

   • 📅 Year: 2023
   • ✍ Authors: M. Aldrigo, L. Zappelli, A. Cismaru, M. Dragoman, S. Iordanescu, D. Mladenovic, C. Parvulescu, D. Vasilache, C. H. Joseph, D. Mencarelli et al.
   • 🔗 DOI: 10.1109/ACCESS.2023.3296804

5. Harvesting Microwave Energy Using Pyroelectricity of Nanostructured Graphene/Zirconium-Doped Hafnium Oxide Ferroelectric Heterostructures

   • 📅 Year: 2023
   • ✍ Authors: Mircea Dragoman, Martino Aldrigo, Adrian Dinescu, Dan Vasilache, Sergiu Iordanescu, Daniela Dragoman, Emiliano Laudadio, Eleonora Pavoni
   • 🔗 DOI: 10.1088/1361-6528/acbcd9

6. Nanomaterials and Devices for Harvesting Ambient Electromagnetic Waves

   • 📅 Year: 2023
   • ✍ Authors: Mircea Dragoman, Martino Aldrigo, Adrian Dinescu, Dan Vasilache, Sergiu Iordanescu, Daniela Dragoman
   • 🔗 DOI: 10.3390/nano13030595

7. Multilevel Spiral Axicon for High-Order Bessel–Gauss Beams Generation

   • 📅 Year: 2023
   • ✍ Authors: Rebeca Tudor, George Andrei Bulzan, Mihai Kusko, Cristian Kusko, Viorel Avramescu, Dan Vasilache, Raluca Gavrila
   • 🔗 DOI: 10.3390/nano13030579

8. A GHz Operating CMOS Compatible ScAlN Based SAW Resonator Used for Surface Acoustic Waves/Spin Waves Coupling

   • 📅 Year: 2022
   • ✍ Authors: I. Zdru, C. Nastase, L. N. Hess, F. Ciubotaru, A. Nicoloiu, D. Vasilache, M. Dekkers, M. Geilen, C. Ciornei, G. Boldeiu et al.
   • 🔗 DOI: 10.1109/LED.2022.3196101

9. MoS₂ Radio: Detecting Radio Waves With a Two-Dimensional Transition Metal Dichalcogenide Semiconductor

   • 📅 Year: 2020
   • ✍ Authors: Mircea Dragoman, Martino Aldrigo, James Connolly, Ian M Povey, Sergiu Iordanescu, Adrian Dinescu, Dan Vasilache, Mircea Modreanu
   • 🔗 DOI: 10.1088/1361-6528/ab5123

10. Manufacturing and DC Characterization of Conductive Through Wafer Via for MEMS Applications

• 📅 Year: 2019
• ✍ Authors: Dan Vasilache, Sergiu Iordanescu, Andrei Avram, Marian Popescu, Viorel Avramescu
• 🔗 DOI: 10.1088/1361-6641/aafe9c